Thermal Processing & Analysis

Rapid Thermal Annealing (RTA) Vacuum Furnace - Ulvac Technology MILA 3000-P-N

The Ulvac Technology MILA 3000 Rapid Thermal Annealing (RTA) vacuum furnace is a programmable tabletop furnace for high temperature materials testing and analysis. It can heat samples to 1200°C in less than 24 seconds using an infrared gold image furnace with a programmable digital temperature controller, a quartz glass chamber and a gas controller.


• Very rapid heating and cooling for annealing, gas quenching, thermal cycling, sintering and melting point determinations
• Heating rates of 50°C/sec. with temperature uniformity of +/- 2°C
• Heating in a variety of atmospheres including air, vacuum and inert/reactive gas


Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260


  • Internal Academic: $25
  • External Academic: $25
  • Industry: $100
For general inquiries, contact:

Donald J. Goralski
Director, Shared Instrumentation Laboratories
(716) 645-5151

For technical inquiries, contact:

Jeff Salzmann
Assistant Professor of Research, Cleanroom Manager
(716) 645-2584