E-Beam Evaporator with Glancing Angle Deposition (GLAD) - Kurt J. Lesker Company AXXIS

The Kurt J. Lesker AXXIS Electron-Beam Evaporator with Glancing Angle Deposition (GLAD) enables e-beam deposition of thin films of metals for contact layers on microelectronic devices.


·         6 pocket e-beam evaporator head

·         Materials include: Au, Cr, PT, Ti, Ni, Ge (for use of SiO₂, Ge, Ag, Ni,
          please see the BOC Edwards Auto 500 Electron Beam Evaporator)

·         6000V power supply, 500 mA, beam sweep, substrate rotation

·         GLAD (glancing angle deposition with multi-position sample mount arm)

·         2 quartz thickness monitors

·         Computer controlled deposition

·         Dry rough pump, Cryopumped chamber with ultimate vacuum of 1 x 10⁻⁹
          Torr, Typical vacuum during deposition 1 x 10⁻⁷ Torr

·         Fast cycle times



Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260


  • Internal Academic: $25
  • External Academic: $25
  • Industry: $100

**Most metals included in the above hourly rates. Additional charge for Au and Pt.

For general inquiries, contact:

Donald J. Goralski
Director, Shared Instrumentation Laboratories
(716) 645-5151

For technical inquiries, contact:

Jeff Salzmann
Assistant Professor of Research, Cleanroom Manager
(716) 645-2584