E-Beam Evaporator with Glancing Angle Deposition (GLAD) - Kurt J. Lesker Company AXXIS

·         6 pocket e-beam evaporator head

·         Materials include: Au, Cr, PT, Ti, Ni, Ge (for use of SiO₂, Ge, Ag, Ni,
          please see the BOC Edwards Auto 500 Electron Beam Evaporator)

·         6000V power supply, 500 mA, beam sweep, substrate rotation

·         GLAD (glancing angle deposition with multi-position sample mount arm)

·         2 quartz thickness monitors

·         Computer controlled deposition

·         Dry rough pump, Cryopumped chamber with ultimate vacuum of 1 x 10⁻⁹
          Torr, Typical vacuum during deposition 1 x 10⁻⁷ Torr

·         Fast cycle times

**Most metals included in the above hourly rates. Additional charge for Au and Pt.