Deposition

E-Beam Evaporator with Glancing Angle Deposition (GLAD) - Kurt J. Lesker Company AXXIS

The Kurt J. Lesker AXXIS Electron-Beam Evaporator with Glancing Angle Deposition (GLAD) enables e-beam deposition of thin films of metals for contact layers on microelectronic devices.

Features

·         6 pocket e-beam evaporator head

·         Materials include: Au, Cr, PT, Ti, Ni, Ge (for use of SiO₂, Ge, Ag, Ni,
          please see the BOC Edwards Auto 500 Electron Beam Evaporator)

·         6000V power supply, 500 mA, beam sweep, substrate rotation

·         GLAD (glancing angle deposition with multi-position sample mount arm)

·         2 quartz thickness monitors

·         Computer controlled deposition

·         Dry rough pump, Cryopumped chamber with ultimate vacuum of 1 x 10⁻⁹
          Torr, Typical vacuum during deposition 1 x 10⁻⁷ Torr

·         Fast cycle times

 

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

Usage Fee: $25/hour (academic), $100/hour (industry)

**Most metals included in the above hourly rates. Additional charge for Au and Pt.

Kurt J. Lesker AXXIS Electron-Beam Evaporator with Glancing Angle Deposition (GLAD)

For general inquiries, contact:

Donald J. Goralski

Director, Shared Instrumentation Laboratories

(716) 645-5151

 

For technical inquiries, contact:

David Eason, PhD

Technical Director, Shared Instrumentation Laboratories

(716) 645-8496