NYS Center of Excellence in Bioinformatics and Life Sciences (CBLS) Multidisciplinary Cleanroom

Center of Excellence Cleanroom.

The CBLS cleanroom is an ISO 6 and ISO 7 certified multidisciplinary facility with bay and chase structured research space, located on UB's Downtown Campus in Buffalo. It houses state-of-the-art microfabrication tools and specialized equipment for thin film processing, photolithography, materials characterization and other high-tech processes.  

About the facility

The CBLS Cleanroom offers:

  • Class 1000 space
  • Class 10,000 space


The CBLS Cleanroom is available for shared use by:

  • UB students
  • UB faculty
  • Researchers at other academic institutions
  • Government
  • Industry

An equipment usage fee is charged on an hourly basis. For bench space only, daily rates will apply. Please contact the facility manager for bench space rates.

Technical capabilities

  • Deposition (thermal evaporation and E-beam evaporation)
  • Patterning (photolithography and lift-off)
  • Etching (wet etching and RIE/ICP dry etching)
  • Cleaning (wet clean and plasma clean)
  • Thermal Processes (annealing)
  • Metrology (optical microscopy, profilometry and ellipsometry)
  • Wafer bonding (Direct Bonding, plasma bonding and anodic bonding)
  • MEMS fabrication (bulk/surface micromachining, soft lithography and hot embossing/micro-imprinting)


  • Facility orientation
  • On-site technical support, training and assistance
  • Project consultation
  • Processing & process development
  • Cleanroom space lease
  • Workforce training/education
Hours of operation

Monday thru Friday

9 AM - 5 PM

For additional information or to schedule lab time, contact:

Smitha James

Scientific Resource Manager, CBLS

(716) 881-8940


Zongmin (Shirley) Bei, Ph.D.

Sr. Research Support Specialist, CBLS

(716) 881-8967

CBLS Affiliated Facilities


The 1,500-square-foot CBLS Cleanroom is located in UB's New York State Center of Excellence in Bioinformatics & Life Sciences (CBLS) on UB's Downtown Campus in Buffalo. Part of the Buffalo Niagara Medical Campus, the CBLS is close to Roswell Park Cancer Institute, Buffalo General Medical Center, UB's Clinical and Translational Research Center, and other leading institutions.