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Equipment and Instrumentation Portal (EQUIP)

Metrology & Surface Science

Profilometer - Tencor Alpha Step 200

The Tencor AlphaStep 200 Profilometer is a stylus-based surface profiler used to measure thin film thicknesses, step heights, etch depths, and micro-roughness in a range of 100 Å up to 165 microns.

Features

• Vertical sensitivity: 20 Å to 50 Å
• Vertical resolution: 15 Å with ± 160 kÅ range, 20 nm with ± 160 nm range
• Video Zoom of substrate
• For wafers up to 4”
• Maximum sample thickness 21 mm
• Vertical resolution: 5 Å (KÅ range), 5 nm (μm range)
• Horizontal resolution 400 Å
• Scan length 50 – 50 000 um.
• Maximum vertical range 160 μm

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

Usage Fee: $25/hour (academic), $100/hour (industry)

Profilometer - Tencor Alpha Step 200

Profilometer - Tencor Alpha Step 200

For general inquiries, contact:

Donald J. Goralski

Director, Shared Instrumentation Laboratories

(716) 645-5151

 

For technical inquiries, contact:

David Eason, PhD

Technical Director, Shared Instrumentation Laboratories

(716) 645-8496