Deposition

Sputter Evaporator - Denton Vacuum DV502A

The Denton Vacuum DV502A Sputter Evaporator offers DC (direct current) sputtering of metals deposited for contact layers on microelectronic devices.

Features

• 3 magnetron sputter heads
• 2 DC power supplies, 1 quartz thickness monitor, substrate rotation
• Sputter down, Ar plasma gas, oil rough pump, turbopumped chamber, ultimate vacuum level 6x10-7 Torr

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

  • Internal Academic: $25
  • External Academic: $25
  • Industry: $100
For general inquiries, contact:

Donald J. Goralski
Director, Shared Instrumentation Laboratories
(716) 645-5151