Deposition

E-Beam Evaporator - BOC Edwards Auto 500

The BOC Edwards Auto 500 Electron Beam Evaporator is a front loading system for thin metal/oxide deposition. Thin films of metals can be deposited for contact layers or dielectrics for microelectronic devices.

Features

• 4 pocket e-beam evaporator head

• Materials include: SiO2, Ge, Ag, Ni  (For use of Au, Cr, Pt, Ti, or Ni, please see the Kurt J. Lesker AXXIS Electron-Beam Evaporator with Glancing Angle Deposition (GLAD)

• 5000V power supply

• Quartz heater to heat samples

• X-Y beam sweep, substrate rotation, quartz thickness monitor

• Typical base pressure during deposition 1 x 10⁹ Torr

• Dry rough pump, Turbopumped chamber

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

  • Internal Academic: $25
  • External Academic: $25
  • Industry: $100
E-Beam Evaporator BOC Edwards Auto 500.

E-Beam Evaporator BOC Edwards Auto 500

For general inquiries, contact:

Donald J. Goralski
Director, Shared Instrumentation Laboratories
(716) 645-5151

For technical inquiries, contact:
David Eason, PhD
Assistant Professor of Research
Department of Electrical Engineering and Materials Design and Innovation
Technical Director, Shared Instrumentation Laboratories (SIL)
114A Davis Hall
716-645-8496