Deposition

Sputter Evaporator - Denton Vacuum DV502A

The Denton Vacuum DV502A Sputter Evaporator offers DC (direct current) sputtering of metals deposited for contact layers on microelectronic devices.

Features

• 3 magnetron sputter heads
• 2 DC power supplies, 1 quartz thickness monitor, substrate rotation
• Sputter down, Ar plasma gas, oil rough pump, turbopumped chamber, ultimate vacuum level 6x10-7 Torr

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

Usage Fee: $25/hour (academic), $100/hour (industry)

Sputter Evaporator - Denton Vacuum DV502A

For general inquiries, contact:

Donald J. Goralski

Director, Shared Instrumentation Laboratories

(716) 645-5151

 

For technical inquiries, contact:

David Eason, PhD

Technical Director, Shared Instrumentation Laboratories

(716) 645-8496