Spin Coaters: SCS; Laurell (ø150mm)

Two Specialty Coating Systems (SCS) G3P-8 Spin Coaters

Easy-to-use spin coaters for precise and uniform deposition of thin films and coatings. They can be used to deposit metal oxide thin films, polymer coatings and metal organic thin films.


  • 30 programmable recipes, with up to 20 steps each
  • each step can be 0-10,000 rpm

The Laurell Technologies Corporation WS-650MS-23NPP/LITE ø150mm Spin Coater


  • Enables SU photoresist coating of substrate wafers


Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260


Usage Fee: $25/hour (academic), $100/hour (industry)

Spin Coaters – Several spin coaters are available for photoresist application

For general inquiries, contact:

Donald J. Goralski

Director, Shared Instrumentation Laboratories

(716) 645-5151


For technical inquiries, contact:

David Eason, PhD

Technical Director, Shared Instrumentation Laboratories

(716) 645-8496