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Equipment and Instrumentation Portal (EQUIP)

Photolithography

Spin Coater - Brewer Science CEE-200

The Brewer Science CEE-200 is a fully programmable spin coater intended for use as a semiconductor or optical application spin coating machine.

Features

• Spin speed: 0 to 6,000 rpm
• Spin speed accuracy: ± 1 rpm
• Spin speed resolution: < 0.2 rpm
• Substrate: < 1 cm to 200 mm round or 7” x 7” square
• Able to store max 20 recipes with unlimited number of user-defined program steps
• Touch screen interface and display for easy operation

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

Usage Fee: $25/hour (academic), $100/hour (industry)

Spin Coater - Brewer Science CEE-200

Spin Coater - Brewer Science CEE-200

For general inquiries, contact:

Donald J. Goralski

Director, Shared Instrumentation Laboratories

(716) 645-5151

 

For technical inquiries, contact:

David Eason, PhD

Technical Director, Shared Instrumentation Laboratories

(716) 645-8496