University at Buffalo - The State University of New York
Skip to Content
Equipment and Instrumentation Portal (EQUIP)

Microscopy & Metrology

Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam

The Carl Zeiss AURIGA CrossBeam Focused Ion Beam Electron Microscope is a state-of-the-art advanced scanning electron microscope integrated with high-resolution focused ion beam milling that enables photographic, chemical, and structural analysis of many inorganic and organic samples as well as nanoscale patterning via FIB etching or FIB-driven deposition of metals and insulators from gas-phase precursors. The system also includes TEM liftout, Oxford EDS system, and Avizo imaging interface/software for 3D reconstruction.

Features

• Focused ion beam (FIB) pattern writing with NanoPatterning & Visualization Engine (NPVE)
• Precise preparation of cross-sectional samples for transmission electron microscopy (TEM)
• 3D tomography: 3D visualization with nanometer-scale resolution
• High resolution Field-emission-SEM and FIB imaging
• Energy-dispersive x-ray spectroscopy to analyze material composition (with nm resolution)
• Gas injection for both etching and deposition of both conducting and insulating materials

Location

Electrical Engineering Cleanroom
Davis Hall, Suite 114
University at Buffalo North Campus
Buffalo, NY 14260

Fees

Usage Fees:

SEM Imaging Only ACADEMIC RATES           

$35/hour unassisted for the first 20 hours of the month

$25/hour unassisted for the second 20 hours of the month

$15/hour unassisted for the third 20 hours of the month

$45/hour with technical assistance

        INDUSTRY RATES

$200/hour assisted

$150/hour unassisted (no unassisted use permitted without full training)

 

Focused Ion Beam:  ACADEMIC RATES

$35/hour unassisted for the first 20 hours of the month

$25/hour unassisted for the second 20 hours of the month

$15/hour unassisted for the third 20 hours of the month

$45/hour with technical assistance

         INDUSTRY RATES

$400 per hour (no unassisted use permitted w/o full training)

Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam

Focused Ion Beam Scanning Electron Microscope (FIB-SEM) - Carl Zeiss AURIGA CrossBeam

For initial inquiries, contact:

Donald Goralski

Director, Shared Instrumentation Laboratories

(716) 645-5151

 

For technical inquiries, contact:

Yueling Qin, PhD

Research Assistant Professor

Sr. Research Support Specialist

(716) 645-8698

or

David Eason, PhD

Technical Director, Shared Instrumentation Laboratories

(716) 645-8496