University at Buffalo

UB Graduate Academic Schedule: Spring 2018

  • This information is updated nightly. Additional information about this course, including real-time course data, prerequisite and corequisite information, is available to current students via the HUB Student Center, which is accessible via MyUB. Information about HUB can be found at

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    MAE 584LEC - Nano/microtechnologies Mems
    Nano/microtechnologies Mems 000 Enrollment Information (not real time - data refreshed nightly)
    Class #:   19277   Enrollment Capacity:   20
    Section:   000   Enrollment Total:   6
    Credits:   3.00 credits   Seats Available:   14
    Dates:   01/29/2018 - 05/11/2018   Status:   OPEN
    Days, Time:   T R , 12:30 PM - 1:50 PM
    Room:   Norton 213 view map
    Location:   North Campus      
      Course Description
    Introduces advanced technologies that enable integration of micro-sensors and micromechanical components on the same chip to produce miniature devices called micro electromechanical systems (MEMS). The course covers physical principles and design rules that govern the performance of a device at small length scales. Discuss a large set of microfabrication techniques including photolithography, material removal processes, and additive technologies. Discuss the applications of MEMS devices in automotive, communication, energy, and BioMEMS in biomedical applications.
                 Hua, Z look up    
      On-line Resources
    Other Courses Taught By: Hua, Z