University at Buffalo

UB Graduate Academic Schedule: Fall 2017


  • This information is updated nightly. Additional information about this course, including real-time course data, prerequisite and corequisite information, is available to current students via the HUB Student Center, which is accessible via MyUB. Information about HUB can be found at www.buffalo.edu/hub


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    EE 548LEC - Microeltrn Dvc Fabrctin
    Lecture
    Microeltrn Dvc Fabrctin 000 Enrollment Information (not real time - data refreshed nightly)
    Class #:   23072   Enrollment Capacity:   30
    Section:   000   Enrollment Total:   26
    Credits:   3.00 credits   Seats Available:   4
    Dates:   08/28/2017 - 12/08/2017   Status:   OPEN
    Days, Time:   W , 5:00 PM - 7:50 PM
    Room:   Obrian 109 view map
    Location:   North Campus      
      Course Description
    Fabrication technology for microelectronic devices: crystal growth, wafer fabrication and characterization, mask fabrication, photo-resist chemistry and physical properties, photo, e-beam and x-ray-lithography, diffusion doping, ion implantation, etching, , CVD, MBE, DC and RF plasma reactors, evaluation and packaging. Operation of microelectronic devices (interconnects, passive devices, and MOS devices), micro-optical devices (CDRs, etc.) and micro electromechanical devices (micro-motors, micro-mirror arrays, etc).
      Instructor(s)
                 Cheng, P look up    
      On-line Resources
    Other Courses Taught By: Cheng, P