Graduate UB Academic Schedule

This information is updated nightly. Additional information about this course, including real-time course data, prerequisite and corequisite information, is available to current students via the HUB Student Center, which is accessible via MyUB.

EE 548LEC - Microeltrn Dvc Fabrctin
Lecture



Microeltrn Dvc Fabrctin 000			Enrollment Information (not real time - data refreshed nightly)


Class #:	19857		Enrollment Capacity:	30
Section:	000		Enrollment Total:	21
Credits:	3.00 credits		Seats Available:	9
Dates:	08/31/2020 - 12/11/2020		Status:	OPEN
Days, Time:	W , 5:30 PM - 8:20 PM
Room:	Remote	view map
Location:	Remote


Course Description


Fabrication technology for microelectronic devices: crystal growth, wafer fabrication and characterization, mask fabrication, photo-resist chemistry and physical properties, photo, e-beam and x-ray-lithography, diffusion doping, ion implantation, etching, , CVD, MBE, DC and RF plasma reactors, evaluation and packaging. Operation of microelectronic devices (interconnects, passive devices, and MOS devices), micro-optical devices (CDRs, etc.) and micro electromechanical devices (micro-motors, micro-mirror arrays, etc).


Instructor(s)



	Cheng, P	look up


On-line Resources


Textbook information is available in the class schedule in the HUB Student Center via MyUB. Graduate School Homepage Office of the Registrar


Other Courses Taught By: Cheng, P


EE 699TUT Dissertation EE 598TUT Individual Problems EE 599TUT Masters Research EE 511LEC Prob In Biomedical Engrg

UB Graduate Academic Schedule: Fall 2020