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University at Buffalo

UB Graduate Academic Schedule: Fall 2020

This information is updated nightly. Additional information about this course, including real-time course data, prerequisite and corequisite information, is available to current students via the HUB Student Center, which is accessible via MyUB.


EE 548LEC - Microeltrn Dvc Fabrctin
Microeltrn Dvc Fabrctin 000 Enrollment Information (not real time - data refreshed nightly)
Class #:   19857   Enrollment Capacity:   30
Section:   000   Enrollment Total:   21
Credits:   3.00 credits   Seats Available:   9
Dates:   08/31/2020 - 12/11/2020   Status:   OPEN
Days, Time:   W , 5:30 PM - 8:20 PM
Room:   Remote view map
Location:   Remote      
  Course Description
Fabrication technology for microelectronic devices: crystal growth, wafer fabrication and characterization, mask fabrication, photo-resist chemistry and physical properties, photo, e-beam and x-ray-lithography, diffusion doping, ion implantation, etching, , CVD, MBE, DC and RF plasma reactors, evaluation and packaging. Operation of microelectronic devices (interconnects, passive devices, and MOS devices), micro-optical devices (CDRs, etc.) and micro electromechanical devices (micro-motors, micro-mirror arrays, etc).
             Cheng, P look up    
  On-line Resources
Other Courses Taught By: Cheng, P